A developing treatment apparatus for performing a developing treatment for
a substrate, includes a substrate holding member for holding the
substrate; an outer peripheral plate surrounding an outer peripheral
portion of the substrate to form a gap between the plate and the outer
peripheral portion of the substrate; and gas blowout ports for forming a
gas flow which flows on a rear face of the substrate from a central
portion side of the substrate to the outer peripheral portion side of the
substrate, and passes by a lower end portion side of the gap.