A method of combining output of a plurality of light sources includes
arranging a plurality of light sources in the same plane and having their
beams directed at a first mirror, rotating the first mirror in the plane
so as to direct the beams towards the same direction, and pulsing the
light sources in synchronization with the rotation of the first mirror.
The light sources can include, for example, pulsed lasers or lamps. The
method can further include directing the beams from the first mirror
towards a second counter-rotating mirror, wherein rotation of the second
counter-rotating mirror compensates for angular displacement of the beams
due to rotation of the first mirror. The method can also include
orienting the first mirror at about 45 degrees relative to an incident
path of the beams. This method can be used, for example, to expose a
substrate in a lithography system.