A vacuum pump includes at least one magnetic body located on a circle
about a rotor rotational axis and having a Curie temperature within a
rotor temperature monitoring range; an inductance detecting portion
facing the circle so as to establish a gap between the circle and the
inductance detecting portion, for detecting a change of magnetic
permeability of the magnetic body as an inductance change when the
magnetic body rotates; and a carrier generation device generating a
carrier signal for providing in the inductance detecting portion. An A/D
conversion device samples a detection signal of the inductance detecting
portion synchronously with a carrier generation by the carrier generation
device, and converts the detection signal to a digital signal. A
determination device determines whether or not a temperature of the rotor
exceeds a predetermined temperature, based on the change of the magnetic
permeability of the magnetic body.