Two operation channels CH1 and CH2 of a bidirectional photothyristor chip
31 are disposed away from each other so as not to intersect with each
other. In between a P-gate diffusion region 23 on the left-hand side and
a P-gate diffusion region 23' on the right-hand side on an N-type silicon
substrate, and in between the CH1 and the CH2, a channel isolation region
29 comprised of an oxygen doped semi-insulating polycrystalline silicon
film 35a doped with phosphorus is formed. Consequently, a silicon
interface state (Qss) in the vicinity of the channel isolation region 29
on the surface of the N-type silicon substrate increases, so that holes
or minority carriers in the N-type silicon substrate are made to
disappear in the region. This makes it possible to prevent such
commutation failure that when a voltage of the inverted phase is applied
to the CH2 side at the point of time when the CH1 is turned off, the CH2
is turned on without incidence of light, and this allows a commutation
characteristic to be enhanced.