In a prove card comprising: a probe sheet having a contact terminal
contacting with an electrode provided on a wafer, a wiring led from the
contact terminal, and an electrode electrically connected to the wiring;
and a multilayered wiring substrate having an electrode electrically
connected to the electrode of the probe sheet, wherein a contact between
the contact terminal and the electrode of the wafer is established by one
or more adhesion holder for pressing, from the backside of a terminal
group of the terminal contacts, the terminal group via a press block with
a spring to contact with the electrode pad. A device in which the probe
sheet is attached to the adhesion holder and a plurality of chips are
tested simultaneously by combining the adhesion holder.