A method and apparatus for determining pore size distribution and/or the
presence of at least one killer pore in at least a portion of a porous
film deposited upon a substrate are disclosed herein. In one embodiment,
there is provided a method for determining pore size distribution
comprising: providing the substrate having the film deposited thereupon
wherein the film comprises pores and wherein the pores have a first
volume; exposing the film to an adsorbate at a temperature and a pressure
sufficient to provide condensation of the adsorbate in pores and wherein
the pores after the exposing step have a second volume; and measuring the
difference between the first and the second volume using a volumetric
technique; and calculating the pore size and pore volume using the change
in the first and the second volume, the pressure, and a model that
relates pressure to pore diameter.