A process for enhancing the adhesion of directly plateable materials to an
underlying dielectric is demonstrated, so as to withstand damascene
processing. Using diffusion barriers onto which copper can be deposited
facilitates conventional electrolytic processing. An ultra-thin adhesion
layer is applied to a degassed, pre-cleaned substrate. The degassed and
pre-cleaned substrate is exposed to a precursor gas containing the
adhesion layer, optionally deposited by a plasma-assisted CVD process,
resulting in the deposition of an adhesion layer inside the exposed
feature. The treated wafer is then coated with a diffusion barrier
material, such as ruthenium, so that the adhesion layer reacts with
incoming diffusion barrier atoms. The adhesion layer may be selectively
bias-sputter etched prior to the deposition of the diffusion barrier
layer. A copper layer is then deposited on the diffusion barrier layer.