There is provided a composition for forming anti-reflective coating for
anti-reflective coating that has a good absorption of light at a
wavelength utilized for manufacturing a semiconductor device, that exerts
a high protection effect against light reflection, that has a high dry
etching rate compared with the photoresist layer. Concretely, the
composition for forming anti-reflective coating contains a triazine
trione compound, oligomer compound or polymer compound having
hydroxyalkyl structure as substituent on nitrogen atom.