A method for transporting a substrate is provided. In this method, a
non-Newtonian fluid is provided and the substrate is suspended in the
non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the
substrate. Thereafter, a supply force is applied on the non-Newtonian
fluid to cause the non-Newtonian fluid to flow, whereby the flow is
capable of moving the substrate along a direction of the flow.
Apparatuses and systems for transporting the substrate using the
non-Newtonian fluid also are described.