In a developing method for performing developing treatment of a substrate
by supplying a developing solution onto a resist film formed on a surface
of the substrate, the present invention controls a zeta potential of the
surface of the substrate at a predetermined potential in the same
polarity as that of a zeta potential of insoluble substances floating in
the developing solution, thereby preventing or reducing the adhesion of
the insoluble substances to the resist film and the substrate. This
remedies the occurrence of development defects. The adhesion of the
insoluble substances to the resist film and the substrate can also be
prevented or inhibited by supplying an acid liquid to a liquid on the
substrate, or controlling a pH value of the liquid on the substrate to
control an absolute value of the zeta potential of the insoluble
substances.