The present invention relates to a method and apparatus for determining
organic additive concentrations in a sample electrolytic solution,
preferably a copper electroplating solution, by measuring the double
layer capacitance of a measuring electrode in such sample solution.
Specifically, the present invention utilizes the correlation between
double layer capacitance and the organic additive concentration for
concentration mapping, based on the double layer capacitance measured for
the sample electrolytic solution.