A composition and an associated method for chemical mechanical
planarization (or other polishing) are described. The composition
includes a surface-modified abrasive modified with at least one
stabilizer and at least one catalyst differing from the at least one
stabilizer. The composition can further include a medium containing the
abrasive and an oxidizing agent (e.g., hydrogen peroxide), wherein the at
least one catalyst is adapted to catalyze oxidation of a substrate by the
oxidizing agent. Preferably, the abrasive is alumina, titania, zirconia,
germania, silica, ceria and/or mixtures thereof, the stabilizer is B, W
and/or Al, and the catalyst is Cu, Fe, Mn, Ti, W and/or V. Both the
stabilizer and the catalyst are immobilized on the abrasive surface. The
method includes applying the composition to a substrate to be polished,
such as substrates containing W, Cu and/or dielectrics.