The present invention provides a polishing slurry which remarkably
inhibits the occurrence of scratch, dishing or erosion. According to the
present invention, provided is a polishing slurry comprising organic
particles (A), an oxidizing agent and a complexing agent, wherein said
organic particles (A) are those obtained by coating a part of the surface
of an organic particle (B) having functional groups capable of reacting
with a metal to be polished on the surface with a resin (C) free from
functional groups capable of reacting with a metal to be polished, and
the organic particle (B) is preferably one containing a copolymer
obtained by polymerization of a monomer composition comprising 1 to 50
weight % of one, two or more monomers selected from a monomer having a
carboxyl group, a monomer having a hydroxyl group, a monomer having an
amino group, a monomer having an acetoacetoxy group and a monomer having
a glycidyl group, and 99 to 50 weight % of other monomers, with each
percentage based on the total weight of the monomers.