A positive photosensitive composition comprises: (A) a resin that has an
acid decomposable repeating unit represented by formula (I) and increases
its solubility in an alkali developer by action of an acid: (B) a
compound generating an acid upon irradiation with actinic light or
radiation; (C) a hydrophobic resin insoluble in an alkali developer and
having at least either one of a fluorine atom and a silicon atom; and (D)
a solvent,
wherein in the formula (I), Xa.sub.1 represents a hydrogen atom, an
alkyl group, a cyano group or a halogen atom, Ry.sub.1 to Ry.sub.3 each
independently represents an alkyl group or a cycloalkyl group, and at
least two of Ry.sub.1 to Ry.sub.3 may be coupled to form a ring
structure, and Z represents a divalent linking group.