A method is provided for fabricating a differential semiconductor
substrate. A first structure is provided which comprises a first
semiconductor substrate including a first semiconductor region, and a
first oxide layer overlying a surface of the first semiconductor
substrate. The first semiconductor substrate has a first crystallographic
orientation. A second structure is provided which includes a second
semiconductor substrate comprising a first layer and a second layer, and
a second oxide layer which overlies a surface of the first layer. The
second semiconductor substrate has a second crystallographic orientation
different than the first crystallographic orientation. The first layer
includes a second semiconductor region. The first layer and the second
oxide layer are removed from the second structure, and assembled to the
first semiconductor substrate to form a composite structure. A bonded
composite structure is then formed by exposing the composite structure to
a temperature adequate to cause bonding of the first oxide layer and the
second oxide layer. Portions of the bonded composite structure are
removed to expose the first semiconductor region and the second
semiconductor region and thereby form the differential semiconductor
substrate.