A finger sensor may include an integrated circuit substrate for receiving a user's finger adjacent thereto, and a plurality of infrared sensing pixels on the substrate. Each infrared sensing pixel may include at least one temperature sensor, at least one infrared antenna, and at least one conductive via interconnecting the at least one temperature sensor and the at least one infrared antenna. The infrared sensing pixels are for sensing infrared radiation emitted from subdermal features when the user's finger is positioned adjacent the integrated circuit substrate. The finger sensor apparatus may also include a processor connected to the infrared sensing pixels for generating infrared biometric data based upon infrared radiation emitted from the subdermal features of the user's finger.