There is provided a pellicle for lithography which has at least, a
pellicle film for dustproof protection, a pellicle frame to which the
pellicle film is adhered, an adhesive layer provided on one end face of
the pellicle frame in order to adhere the pellicle film, and a sticking
layer formed on another end face of the pellicle frame, wherein the
pellicle film is formed by a die coating machine and a method for
producing it. There can be provided a relatively large-sized pellicle for
lithography which has a pellicle film with little unevenness of film
thickness and with a uniform and high light transmission can be produced
easily and at low cost, compared with those using the conventional spin
coater.