Semiconductor devices and methods of fabricating the same are disclosed.
An illustrated semiconductor device fabricating method includes forming a
titanium and titanium-nitride (Ti/TiN) metal layer on a lower oxide
layer; forming an aluminum metal layer on the Ti/TiN metal layer; forming
an indium tin oxide (ITO) layer on the aluminum metal layer; and
patterning the ITO layer, the aluminum metal layer, and the Ti/TiN metal
layer by photolithography to form a metal layer pattern and to expose a
surface of the lower oxide layer, thereby facilitating a process of
filling inter-wiring spaces occurring between adjacent lines of a metal
layer pattern by producing a metal layer pattern having a reduced aspect
ratio.