It is an object of the present invention to provide a highly reliable and
high-quality semiconductor element by effectively preventing the
migration of silver to a nitride semiconductor when an electrode main
entirely or mostly of silver having high reflection efficiency is formed
in contact with a nitride semiconductor layer. A semiconductor element
comprises a nitride semiconductor layer, an electrode connected to said
nitride semiconductor layer, and an insulating film covering at least
part of said electrode, wherein the electrode comprises: a first metal
film including silver or a silver alloy and in contact with the nitride
semiconductor layer; and a second metal film completely covering the
first metal film, and the insulating film comprises a nitride film.