A MEMS microphone with a stacked PCB package is described. The MEMS
package has at least one MEMS acoustic sensor device located on a PCB
stack. A metal cap structure surrounds the at least one MEMS acoustic
sensor device wherein an edge surface of the metal cap structure is
attached and electrically connected to the PCB stack. In a first
embodiment, a back chamber is formed underlying the at least one MEMS
acoustic sensor device and within the PCB stack wherein an opening
underlying the at least one MEMS acoustic sensor device accesses the back
chamber. An opening in the metal cap structure not aligned with the at
least one MEMS acoustic sensor device allows external fluid, acoustic
energy or pressure to enter the at least one MEMS acoustic sensor device.
In a second embodiment, a back chamber is formed in the space under the
metal cap and over the first PCB. A hollow chamber is formed between the
first PCB and the second PCB wherein an opening under the at least one
MEMS acoustic sensor device accesses the hollow chamber. An opening in a
bottom surface of the PCB stack not aligned with the at least one MEMS
acoustic sensor device also accesses the hollow chamber and allows
external fluid, acoustic energy or pressure to enter the at least one
MEMS acoustic sensor device.