A reflective-type projection optical system has 8 reflective mirrors that
form a reduced image of a first surface on a second surface. A first
reflective imaging optical system (G1) forms an intermediate image of the
first surface, and a second reflective imaging optical system (G2) forms
an image of the intermediate image on the second surface. The first
reflective imaging optical system has, from the first surface side in
order of light beam incidence, a first reflective mirror (M1), a second
reflective mirror (M2), a third reflective mirror (M3), and a fourth
reflective mirror (M4). The second reflective imaging optical system has,
from the first surface side in order of light beam incidence, a fifth
reflective mirror (M5), a sixth reflective mirror (M6), a seventh
reflective mirror (M7), and an eighth reflective mirror (M8). At least
one of the reflective surfaces of these 8 reflective mirrors is composed
of a spherical surface.