A method for fabricating an array pH sensor and a readout circuit device
of such array pH sensor are implemented by utilizing an extended ion
sensitive field effect transistor to construct the array pH sensor and
related readout circuit. The structure of the array sensor having this
extended ion sensitive field effect transistor comprises a tin
dioxide/metal/silicon dioxide multi-layer structure sensor and a tin
dioxide/indium tin oxide/glass multi-layer structure sensor and has
excellent properties. Furthermore, the readout circuit and the sensor
utilize two signal generators for controlling and reading signals. In
particular, the sensor can be effective for increasing the accuracy of
measurement and reducing the interference of noise.