A method for making a mask in a process of fabricating a semiconductor
device is disclosed, in which one database is classified into an SRAM
block and a random logic block so that OPC is separately performed for
the SRAM block and the random logic block, thereby improving performance
of the OPC. The method includes dividing an input database into an SRAM
block and a random logic block, respectively performing optical proximity
correction (OPC) for the SRAM block and the random logic block, and
combining the SRAM block to the random logic block.