A MOS or CMOS sensor for high performance imaging in broad spectral ranges
including portions of the infrared spectral band. These broad spectral
ranges may also include portions or all of the visible spectrum,
therefore the sensor has both daylight and night vision capabilities. The
sensor includes a continuous multi-layer photodiode structure on a many
pixel MOS or CMOS readout array where the photodiode structure is chosen
to include responses in the near infrared spectral ranges. A preferred
embodiment incorporates a microcrystalline copper indium
diselenide/cadmium sulfide photodiode structure on a CMOS readout array.
An alternate preferred embodiment incorporates a microcrystalline silicon
germanium photodiode structure on a CMOS readout array. Each of these
embodiments provides night vision with image performance that greatly
surpasses the GEN III night vision technology in terms of enhanced
sensitivity, pixel size and pixel count. Further advantages of the
invention include low electrical bias voltages, low power consumption,
compact packaging, and radiation hardness. In special preferred
embodiments CMOS stitching technology is used to provide multi-million
pixel focal plane array sensors. One embodiments of the invention made
without stitching is a two-million pixel sensor. Other preferred
embodiments available using stitching techniques include sensors with 250
million (or more) pixels fabricated on a single wafer. A particular
application of these very high pixel count sensors is as a focal plane
array for a rapid beam steering telescope in a low earth orbit satellite
useful for tracking over a 1500-meter wide track with a resolution of 0.3
meter.