An optically-powered integrated microstructure pressure sensing system for
sensing pressure within a cavity. The pressure sensing system comprises a
pressure sensor having an optical resonant structure subject to the
pressure within the cavity and having physical properties changing due to
changing pressures within the cavity. A substrate supports the optical
resonant structure. An input optical pathway evanescently couples light
into the optical resonant structure. An output optical pathway collects
light from the optical resonance structure. A light source delivers a
known light input into the input optical pathway whereby the known light
input is evanescently coupled into the optical resonant structure by the
input optical pathway and a portion of such light is collected from the
optical resonant structure by the output optical pathway. A light
detector receives the portion of the light collected from the optical
resonant structure, and generates a light signal indicative of such
portion of the light collected from the optical resonant structure. A
temperature compensation sensor generates a temperature signal indicative
of the temperature near the optical resonant structure. A spectrum
detection device receives the light signal and temperature signal. The
spectrum detection device analyzing the light signal and the temperature
signal with a detection algorithm to generating a pressure signal
indicative of the pressure within the cavity.