A wafer-scale probe card for temporary electrical contact to a sample
wafer or other device, for burn-in and test. The card includes a
plurality of directly metallized single-walled or multi-walled nanotubes
contacting a pre-arranged electrical contact pattern on the probe card
substrate. The nanotubes are arranged into bundles for forming electrical
contacts between areas of the device under test and the probe card. The
bundles are compressible along their length to allow a compressive force
to be used for contacting the probe card substrate to the device under
test. A strengthening material may be disposed around and/or infiltrate
the bundles. The nanotubes forming the bundles may be patterned to
provide a pre-determined bundle profile. Tips of the bundles may be
metallized with a conductive material to form a conformal coating on the
bundles; or metallized with a conductive material to form a continuous,
single contact surface.