An ambient environment nanowire sensor and corresponding fabrication
method have been provided. The method includes: forming a substrate such
as Silicon (Si) or glass; growing nanowires; depositing an insulator
layer overlying the nanowires; etching to expose tips of the nanowires;
forming a patterned metal electrode, with edges, overlying the tips of
the nanowires; and, etching to expose the nanowires underlying the
electrode edges. The nanowires can be a material such as IrO.sub.2,
TiO.sub.2, InO, ZnO, SnO.sub.2, Sb.sub.2O.sub.3, or In.sub.2O.sub.3, to
mane just a few examples. The insulator layer can be a spin-on glass
(SOG) or low-k dielectric. In one aspect, the resultant structure
includes exposed nanowires grown from the doped substrate regions and an
insulator core with embedded nanowires. In a different aspect, the method
forms a growth promotion layer overlying the substrate. The resultant
structure includes exposed nanowires grown from the selectively formed
growth promotion layer.