A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and either the cover or the substrate includes an aperture.

 
Web www.patentalert.com

< Symmetric bipolar junction transistor design for deep sub-micron fabrication processes

> Semiconductor device having via connecting between interconnects

~ 00469