A high-breakdown-voltage semiconductor device comprises a high-resistance
semiconductor layer, trenches formed on the surface thereof in a
longitudinal plane shape and in parallel, first regions formed on the
semiconductor layer to be sandwiched between adjacent ones of the
trenches and having an impurity concentration higher than that of the
semiconductor layer, a second region having opposite conductivity to the
first regions and continuously disposed in a trench sidewall and bottom
portion, a sidewall insulating film disposed on the second region of the
trench sidewall, a third region disposed on the second region of the
trench bottom portion and having the same conductivity as and the higher
impurity concentration than the second region, a fourth region disposed
on the back surface of the semiconductor layer, a first electrode formed
on each first region, a second electrode connected to the third region,
and a third electrode formed on the fourth region.