An acoustic wave device capable of exhibiting good characteristics for a
prolonged period of time and a method of manufacturing an acoustic wave
device are provided. An acoustic wave device of the invention includes a
piezoelectric body layer having piezoelectricity and one surface, a pair
of electrodes for, when electrified, inducing acoustic vibration in the
piezoelectric body layer, the electrodes arranged on the one surface of
the piezoelectric body layer, and a silicon dioxide layer provided in
contact with the piezoelectric body layer and/or the electrodes, the
silicon dioxide layer composed of silicon dioxide as its major component,
wherein the silicon dioxide layer is formed by performing sputtering with
a silicon dioxide target in an atmosphere of an oxygen flow rate ratio of
60% or more.