A salt represented by the formula (I): ##STR00001## wherein X represents a C1-C12 divalent linear or branched chain hydrocarbon group, Y represents a C1-C30 hydrocarbon group which may be substituted with at least one substituent, and at least one --CH.sub.2-- in the C1-C30 hydrocarbon group may be substituted with --O-- or --CO--, Q.sup.1 and Q.sup.2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A.sup.+ represents an organic counter ion.The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).