Disclosed is a plasma processing apparatus and a plasma processing method.
A substrate to be processed is accommodated in a vacuum chamber within
which a plasma generator is provided so as to generate plasma for use in
performing plasma processing on the substrate. Outside the vacuum chamber
provided is a magnetic field generator for generating a multi-pole
magnetic field at the periphery of the substrate. The magnetic field
generator comprises an inner ring-shaped magnetic field generating
portion and an outer ring-shaped magnetic field generating portion, both
of which are provided outside the vacuum chamber in a concentric
relationship with the vacuum chamber and are independently rotatable with
each other.