A test structure in accordance with the present invention allows for
testing of both V.sub.bd TDDB, and leakage current between adjacent gate
features. The test structure comprises a plurality of parallel
polysilicon gate structures overlying a substrate. Traces placing
alternate gates in electrical communication with a polysilicon edge are
connected by a fuse. In one embodiment, a potential difference is applied
across all gates to trigger V.sub.bd, and then the fuse is broken to
allow individual probing of breakdown of the alternate groups of gates.
In another embodiment, the fuse is broken and then force and sense
voltages are applied to the edge polysilicon in communication with the
alternate gate groupings, allowing detection of leakage current between
the alternate groupings of gates that reveals the existence of an
unwanted polysilicon extrusion or bridge.