A filter membrane, methods of making such filter membrane and apparatus
employing such filter membrane are disclosed, in which the filter
membrane is a monolithic polymeric membrane that includes a polymeric
filter layer including a micron-scale precision-shaped pores and a
polymeric support layer that has a precision-shaped porous support
structure for the filter layer. Several methods are disclosed for making
such a membrane using micromachining techniques, including lithographic,
laser ablation and x-ray treatment techniques. Several filter apparatus
employing such a membrane are also disclosed.