To include a focused ion beam apparatus fabricating a sliced specimen by
processing a specimen as well as observing the sliced specimen, a
scanning electron microscope observing the slice specimen, a gas-ion beam
irradiation apparatus performing finishing processing by irradiating a
gas-ion beam onto a surface of the sliced specimen, a specimen stage on
which the sliced specimen is fixed and having at least one or more
rotation axis, a specimen posture recognition means recognizing
positional relation of the sliced specimen with respect to the specimen
stage and a specimen stage control means controlling the specimen stage
based on a specimen posture recognized by the posture recognition means
and an installation angle of the gas-ion beam irradiation apparatus in
order to allow an incident angle of the gas-ion beam with respect to the
obverse or the reverse of the sliced specimen to be a desired value.