The invention provides high performance cantilevers with optimal combinations of high resonant frequency and low force constant. In one aspect, AFM cantilevers with spring constants in the range 1-10.sup.-6 N/m with (fundamental) resonant frequencies in aqueous solutions of 0.1-100 MHz are provided. A high performance cantilever may be made by focused ion beam milling or electron deposition. The high performance cantilevers allow faster scanning, increase the temporal resolution of force measurement, improve measurement sensitivity by reducing cantilever noise, and improve sensitivity by reducing cantilever spring constant.