A catadioptric projection objective for imaging an off-axis effective
object field arranged in an object surface of the projection objective
onto an off-axis effective image field arranged in an image surface of
the projection objective has: an optical axis; an effective object field
situated entirely outside the optical axis and having a length A in a
first direction and a width B in a second direction perpendicular to the
first direction such that a circular area of minimum size enclosing the
effective object field defines a radius R.sub.EOF of the effective object
field according to: ##EQU00001## and a circular design object field
centered around the optical axis having a design object field radius
R.sub.DOF, where the projection objective is essentially corrected with
respect to image aberrations in zones having radial coordinates smaller
than R.sub.DOF and wherein the projection objective is not fully
corrected in zones having radial coordinates larger than R.sub.DOF. The
conditions: R.sub.DOF=.gamma. R.sub.EOF and 1.ltoreq..gamma.<1.4 are
fulfilled. Very high image-side numerical apertures NA>1 are possible
with a compact design. Arcuate effective object fields are preferably
used.