The present invention provides methods and apparatuses that can improve measurement accuracy in interferometers. The invention provides methods for determining digital compensation filters that measure a frequency response or responses to be compensated, and then determining a filter target response from the inverse of the frequency response or responses. A digital compensation filter can be determined from the filter target response using a discrete sum of cosines with a phase argument. The invention also allows other desired filter responses to be integrated into the filter target response before determining the digital compensation filter.