A display system includes a light source and a first optical system
coupled to the light source and adapted to provide an illumination beam
along an illumination path. The display system also includes a spatial
light modulator positioned in the illumination path. The spatial light
modulator includes a semiconductor substrate including a plurality of
electrode devices and a hinge structure coupled to the semiconductor
substrate. The hinge structure includes silicon material. The spatial
light modulator also includes a mirror post coupled to the hinge
structure and extending to a predetermined distance from the
semiconductor substrate and a mirror plate coupled to the mirror post and
overlying the plurality of electrode devices. The display system further
includes a second optical system coupled to the spatial light modulator
and adapted to project an image onto a projection surface.