A split gate memory cell has a select gate, a control gate, and a charge
storage structure. The select gate includes a first portion located over
the control gate and a second portion not located over the control gate.
In one example, the first portion of the select gate has a sidewall
aligned with a sidewall of the control gate and aligned with a sidewall
of the charge storage structure. In one example, the control gate has a
p-type conductivity. In one example, the gate can be programmed by a hot
carrier injection operation and can be erased by a tunneling operation.