A compliant contact structure and contactor card for operably coupling
with a semiconductor device to be tested includes a substantially planar
substrate with a compliant contact formed therein. The compliant contact
structure includes a portion fixed within the substrate and at least
another portion integral with the fixed portion, laterally unsupported
within a thickness of the substrate and extending beyond a side thereof.
Dual-sided compliant contact structures, methods of forming compliant
contact structures, a method of testing a semiconductor device and a
testing system are also disclosed.