Provided are a probe card, a test apparatus having the probe card, and a
test method using the test apparatus. The probe card includes a probe
substrate having a signal line, a probe needle connected to the signal
line and fixed to the probe substrate, and a cooling unit for cooling the
temperature of the probe needle. Therefore, the probe needles contacting
each chip can be maintained at a certain low temperature without
increasing the temperature. As a result, it is possible to pervent
deformation of the probe needles and minimize an amount of impurities
stuck to the probe needles.