According to an aspect of the invention, there is provided a pattern
correction method in which a shape of a target pattern is corrected in
accordance with an arrangement state between the target pattern
configuring a designed pattern and a vicinity pattern disposed in the
vicinity of the target pattern, the pattern correction method comprises
detecting a first arrangement state between a first predetermined portion
of an edge of the target pattern and the vicinity pattern, detecting a
second arrangement state between a second predetermined portion of the
edge of the target pattern and the vicinity pattern, determining a
correction value of the edge of the target pattern based on a rule in
accordance with the first and second arrangement states, and adding the
correction value to the edge of the target pattern.