Shields for feedthrough pin insulators of a hot cathode ionization gauge
are provided to increase the operational lifetime of the ionization gauge
in harmful process environments. Various shield materials, designs, and
configurations may be employed depending on the gauge design and other
factors. In one embodiment, the shields may include apertures through
which to insert feedthrough pins and spacers to provide an optimal
distance between the shields and the feedthrough pin insulators before
the shields are attached to the gauge. The shields may further include
tabs used to attach the shields to components of the gauge, such as the
gauge's feedthrough pins. Through use of example embodiments of the
insulator shields, the life of the ionization gauge is extended by
preventing gaseous products from a process in a vacuum chamber or
material sputtered from the ionization gauge from depositing on the
feedthrough pin insulators and causing electrical leakage from the
gauge's electrodes.