A particle counter for optically detecting an unconstrained particle of
less than one micron in size suspended in a flowing liquid includes a
sample chamber having a fluid inlet and a fluid outlet; a laser module
producing a laser beam; a beam shaping optical system providing a
multiple laser beam pattern in the sample chamber, and a CMOS optical
detector located to detect light scattered by the particles in the sample
chamber. The particle counter has a particle sensing area within the
sample chamber in which the intensity of light is at least 10
Watts/mm.sup.2, the sensing area having an area of 0.5 square mm or more.
The detector has thirty or more detector array elements. In the preferred
embodiment, the laser optical system reflects and refocuses the laser
beam to effect multiple passes of the same laser beam through the sensing
area.