An electrode for a memory material of a phase change memory device is
disclosed. The electrode includes a first layer adhered to the memory
material, the first layer including a nitride (AN.sub.x), where A is one
of titanium (Ti) and tungsten (W) and x greater than zero, but is less
than 1.0, and a second layer adhered to the first layer, the second layer
including a nitride (AN.sub.y), where y is greater than or equal to 1.0.
The multiple layer electrode allows the first layer to better adhere to
chalcogenide based memory material, such as GST, than for example,
stoichiometric TiN or WN, which prevents delamination. A phase change
memory device and method are also disclosed.