An electron source include a first cathode electrode disposed over a
substrate and terminated to provide electrons; an emitter layer disposed
over the cathode electrode and formed from one or plurality vertically
aligned and mono-dispersed nano-structures that are truncated to the same
length, embedded in a solid matrix and protruding above the surface for
emitting electrons; an insulator disposed over the emitter layer and
having one or plurality of apertures, each is self-aligned with and
exposes one nano-structure in the emitter layer; and a second gate
electrode disposed over the insulator, having one or plurality of
apertures self-aligned with the apertures in the insulator and terminated
to extract electrons from the exposed nano-structures through the
apertures. The gate aperture is substantially less than one micrometer
and the gated nano-structures can have a density on the order of
10.sup.8/cm.sup.2. Such an electron source can be modulated with an extra
low voltage, emits electrons with high current density and high
uniformity, and operates with high energy-efficiency and long lifetime.