The present invention provides a method for producing a Group III nitride
compound semiconductor crystal, the semiconductor crystal being grown
through the flux method employing a flux. At least a portion of a
substrate on which the semiconductor crystal is to be grown is formed of
a flux-soluble material. While the semiconductor crystal is grown on a
surface of the substrate, the flux-soluble material is dissolved in the
flux from a surface of the substrate that is opposite the surface on
which the semiconductor crystal is grown. Alternatively, after the
semiconductor crystal has been grown on a surface of the substrate, the
flux-soluble material is dissolved in the flux from a surface of the
substrate that is opposite the surface on which the semiconductor crystal
has been grown. The flux-soluble material is formed of silicon.
Alternatively, the flux-soluble material or the substrate is formed of a
Group III nitride compound semiconductor having a dislocation density
higher than that of the semiconductor crystal to be grown.