Low-noise, high-dynamic-range readout circuits with reduced power
dissipation for capacitive sensors having small sensing capacitance and
low transducer sensitivity are provided by combining a mixed modulation
clock and a dual-chopper amplifier (DCA) circuit. The mixed modulation
clock is generated by an exclusive-OR (XOR) of a high frequency clock and
a low frequency clock. With the mixed modulation clock, an input signal
is double-modulated by the high frequency clock and the low frequency
clock, respectively. The DCA amplifies the input signal in two
amplification stages. The first amplification stage amplifies the
double-modulated signal and then demodulates the amplified signal by the
high-frequency clock. Then, the second amplification stage amplifies the
signal as a conventional chopper amplifier with the low-frequency clock
as the chopping clock. Low pass filters following the two amplification
stages filter out the modulated circuit offset and low-frequency flicker
noise.