A memory cell and a method of fabricating the memory cell having a small
active area are provided. By forming a spacer in a window that is sized
at the photolithographic limit, in one embodiment, a pore may be formed
in dielectric layer which is smaller than the photolithographic limit.
Electrode material is deposited into the pore, and a layer of structure
changing material, such as chalcogenide, is deposited onto the lower
electrode, thus creating a memory element having an extremely small and
reproducible active area.